Title: Real Time Measurement of Ellipsometric Angles by Common Path Heterodyne Interferometry

Year of Publication: Jul - 2015
Page Numbers: 181-186
Authors: Hui-Kang Teng , Kuo-Chen Lang
Conference Name: The International Conference on Electronics and Software Science (ICESS2015)
- Japan


A heterodyne interferometer is presented for measuring the ellipsometric angles in real time. These two angles are calculated in terms of two heterodyne interference signals that determined accurately by maximum likelihood method. Since the common path design of the interferometer eliminates the noises carried by the heterodyne signals, high accuracy of the measurement is achieved.